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Sputter | Inline Sputter G3.5

* Category : Sputter

* STATUS : 생산 가동 중

* MANUFACTURE : Anelva

* MODEL : C-3941L-T

* VINTAGE : 2003

* SERIAL NO :

* WAFER SIZE : 370 X 470 / 550 X 650

* DESCRIPTION :

Sputtering 方式 ; DC-Magnetron Sputtering
Chamber構成 ; 11Chamber 6Door In-Line Type
                    (Load Lock / Sub Load Lock / Buffer 1 / Sputter 1 / Baking 1 / 
                     Sputter 2 / Baking 2 / Sputter 3 / Buffer 2 / Sub UnLoad Lock / UnLoad Lock )
Glass Size ;  550mm × 650mm × 0.7 ,1.1mm, 2枚/Tray set (Tray 2枚)
                (450mm × 550mm × 0.7, 1.1mm, 2枚/Tray set (Adaptor付着)) 
                 400mm × 500mm × 0.7 ,1.1mm, 4枚/Tray set (Tray 2枚)
                 (360mm × 465mm × 0.7, 1.1mm, 4枚/Tray set (Adaptor付着))
Carrier 有効蒸着面積 ; 550mm(H) × 800mm(L) (Tray : 810mm(H) * 950mm(W)
Tact Time  ;  2.0分(CrOxNy + Cr : 1700Å, 基板加熱基準 Max. 250℃)
生産量 ; (1) 550mm × 650mm  60枚/Hour1440枚/Day 
           (2)  400mm × 550mm 120枚/Hour2880枚/Day 
Cathode (Target) ; 16 (6” * 28” : 12個, 10”*28” : 4個)
Power Supply ; DC Pulse 20Kw 5台,12Kw 1台 / MF 6台
                    PDC-609 12Kw (6Kw *2) * 4台

Contact Info

NIT Corporation

+82-41-621-6511

E-mail: sales@newinte.com

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