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Sputter | Inline용 Sputter

* Category : Sputter

* STATUS : 설치 가동 중

* MANUFACTURE : Anelva

* MODEL : ILC-3940LT

* VINTAGE : 2001

* SERIAL NO :

* WAFER SIZE : 370 X 470 / 550 X 650

* DESCRIPTION :

Sputtering 方式 ; DC-Magnetron Sputtering
Chamber構成 ; 10Chamber 6Door In-Line Type
                    (Load Lock / Sub Load Lock / Buffer 1 / Baking 1 
                     /Sputter 1 / Baking 2 / Sputter 2 / Buffer 2 / Sub UnLoad Lock / UnLoad Lock )
Glass Size ;  370mm × 470mm × 0.7 ,1.1mm, 4枚/Tray set (Tray 2枚)
                (370mm × 470mm 以下は Adaptor 付着して対応
                 550mm × 650mm 専用Trayを使用 成膜可能
Carrier 有効蒸着面積 ; 550mm(H) × 700mm(L) (Tray : 810mm(H) * 880mm(W)
Tact Time  ; 2.5分(CrOxNy + Cr : 1700Å(500 + 1200),基板120℃加熱　基準 )
生産量 ; 1)   550mm × 650mm (拡張専用Carrier使用)  40枚/Hour 960枚/Day
           2)  370mm × 470mm  96枚/Hour      2304枚/Day 
Cathode (Target) ;  10 (6” * 28” : 6個, 10”*28” : 4個)
Power Supply ;  10K-MDX(AE製) : 6台   /   5K-MDX (AE製) : 4台

Contact Info

NIT Corporation

+82-41-621-6511

E-mail: sales@newinte.com

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