TFT G2.5 LCD PECVD > Uesd Equipment

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TFT PECVD | TFT G2.5 LCD PECVD

* Category : TFT PECVD

* STATUS : Uninstallation&Stock

* MANUFACTURE : AKT

* MODEL : AKT-1600A

* VINTAGE : 1999

* SERIAL NO :

* WAFER SIZE : 370 X 470

* DESCRIPTION :

TM - Chamber	
A/B/C/D - Chamber	
MFC BOX		
Regulator Box	
Main Frame		
Control Panel	
INDEX		
Monitor table	
Pump Rack		
DRY PUMP #1(L/L)	
DRY PUMP #2(T/M)	
REMOTE FRAME	
MAIN SCRUBBER	

   * Missing Parts
     - Process(4 Ch.) Pump
     - Susceptor(4 Ch.)

Contact Info

NIT Corporation

+82-41-621-6511

E-mail: sales@newinte.com

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