NIT
English
1. Principal Specification| Item | Required Specification | Replied Spec |
|---|---|---|
| Type | Vacuum Chamber | OK |
| Vacuum Chamber | Quartz Chamber | OK |
| Vacuum Chamber Size | 120 Ø , 1200 mm | OK |
| Vacuum Chamber Type | Side leeding Type | OK |
| Workong Pressure | ≤ 1×10E-6 Torr | OK |
| Temperature | ≤ 400℃ | OK |
| CDA | 5 ~ 7 kg / cm2 | OK |
| N2 | Venting Gas : N2 (>99.7%) | OK |
| Cooking Water | 2 ~ 5 kgf / cm2 , 3 ℓ / min | OK |
2. Software System
1) Auto- & Semi-auto process recipe control
2) 7 inch touch screen rack or equipment frame
3) Main controller and service line controller
4) Recipe selectable auto process sequence start
5) Safety interlock for system and operator (pump, valve, gauge..)
